Application

Use : Manufacturing equipment for semiconductor, FPD and secondary battery, Mounter, Precision elevating stage, etc.

ZG Series

High precision·low vibration Z-axis guide which can be applied in single unit.

Turning Arm : High speeding and reduced cycle time by increasing rigidity.

Bonder

Bonder

Both high rigidity and infinitesimal rolling resistance can bear offset load and secure accurate pressure control.

Electric Actuator

Electric Actuator

Enables minute feeding of sub-micron order with its low vibration guide. On sale as a unit on the separate catalog "Million Actuator"


GNZ Series

Flange type Z-axis guide: the most suitable for elevating stage

Inspection Device : High rigidity and low vibration make the camera statically determinate quicker, and lead to shorter cycle time.

Precision Z stage for the exposure equipment

Precision Z stage for the exposure equipment

Accuracy improvement enables sub-micron order positioning.

Z stage for the prober

Z stage for the prober

Higher guide rigidity reduces the deflection caused by the offset load on the stage.


GBTT Series

Retainerless llong stroke guide

Servo press - The head guide of drilling device for the electronic parts

 
Servo press

Well balanced for a ball screw assembled in a hollow shaft. On sale as a unit on the separate catalog "Million Press"

The head guide of drilling device for the electronic parts

Increased rigidity improves repeatability, and leads to high speeding and reduced cycle time.


GBTM Series

Ultra long stroke, cylindrical shaft guide

Column guide for press machine -  Large Z-axis stage for FPD manufacturing equipment

 
Column guide for press machine

Increased rigidity improves the bottom dead center accuracy of press machine.

Large Z-axis stage for FPD manufacturing equipment

It is the best for the large stage of long stroke.
Improved positioning accuracy reduces product defect rate.


Column sets

Column sets newly released, corresponding to GBT series.

Column sets